Journal de Physique IV

Structure of mixed-phase LPCVD silicon films as a function of operating conditions

B. de Mauduit, C. Bourgerette, V. Paillard, P. Puech and B. Caussat

J. Phys. IV France, 09 PR8 (1999) Pr8-1091-Pr8-1098

DOI: 10.1051/jp4:19998136

B. de Mauduit

C. Bourgerette

V. Paillard

P. Puech

B. Caussat

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