Phase and surface roughness evolution for as-deposited LPCVD silicon films C. Cobianu, R. Plugaru, N. Nastase, S. Nastase, C. Flueraru, M. Modreanu, J. Adamczevska, W. Paszkowicz, J. Auleytner et P. Cosmin J. Phys. IV France, 09 PR8 (1999) Pr8-1083-Pr8-1090 DOI: 10.1051/jp4:19998135