Journal de Physique IV

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In-situ process monitoring of MOCVD of superconducting and dielectric oxide thin films

S. Yamamoto, S. Sugai and S. Oda

J. Phys. IV France, 09 PR8 (1999) Pr8-1013-Pr8-1020

DOI: 10.1051/jp4:19998126

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