CVD niobium in Nb-Hal-(H)-inert gas systems : A thermodynamic and experimental approaches A.N. Golubenko, S.V. Sysoev, A.A. Titov et Yu.G. Stenin J. Phys. IV France, 09 PR8 (1999) Pr8-93-Pr8-99 DOI: 10.1051/jp4:1999812