Journal de Physique IV

CVD niobium in Nb-Hal-(H)-inert gas systems : A thermodynamic and experimental approaches

A.N. Golubenko, S.V. Sysoev, A.A. Titov and Yu.G. Stenin

J. Phys. IV France, 09 PR8 (1999) Pr8-93-Pr8-99

DOI: 10.1051/jp4:1999812

A.N. Golubenko

S.V. Sysoev

A.A. Titov

Yu.G. Stenin

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