Journal de Physique IV

Routes of metal oxide formation from metal β-diketonates used as CVD precursors

A.E. Turgambaeva, V.V. Krisyuk, A.F. Bykov and I.K. Igumenov

J. Phys. IV France, 09 PR8 (1999) Pr8-65-Pr8-72

DOI: 10.1051/jp4:1999808

A.E. Turgambaeva

V.V. Krisyuk

A.F. Bykov

I.K. Igumenov

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