Journal de Physique IV

X-ray lithography : an overview and recent activities at super-ACO

F. Rousseaux, A.M. Haghiri-Gosnet, Y. Chen, M.F. Ravet and H. Launois

J. Phys. IV France, 04 C9 (1994) C9-237-C9-244

DOI: 10.1051/jp4:1994942

F. Rousseaux

A.M. Haghiri-Gosnet

Y. Chen

M.F. Ravet

H. Launois

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