Journal de Physique IV

Computer investigations of the influences of magnets for magnetron-sputtering

O. KNOTEK, F. LÖFFLER, U. SCHNAUT and W. GUAN

J. Phys. IV France, 03 C7 (1993) C7-1211-C7-1216

DOI: 10.1051/jp4:19937186

O. KNOTEK

F. LÖFFLER

U. SCHNAUT

W. GUAN

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