Low-temperature epitaxial growth of in-situ B-doped Si1-xGex films J. MUROTA, F. HONMA, T. YOSHIDA, K. GOTO, T. MAEDA, K. AIZAWA et Y. SAWADA J. Phys. IV France, 03 C3 (1993) C3-427-C3-432 DOI: 10.1051/jp4:1993359