Journal de Physique IV

Plasma-enhanced C.V.D. of amorphous Ge_xS_1-x, and Ge_xSe_1-x films

E. SLEECKX, P. NAGELS, R. CALLAERTS and M. VAN ROY

J. Phys. IV France, 03 C3 (1993) C3-419-C3-426

DOI: 10.1051/jp4:1993358

E. SLEECKX

P. NAGELS

R. CALLAERTS

M. VAN ROY

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