Journal de Physique IV

Deposition of ZrO₂ and Y₂O₃-stabilized ZrO₂ from β-diketonates

M. PULVER, G. WAHL, H. SCHEYTT and M. SOMMER

J. Phys. IV France, 03 C3 (1993) C3-305-C3-312

DOI: 10.1051/jp4:1993342

M. PULVER

G. WAHL

H. SCHEYTT

M. SOMMER

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