Journal de Physique IV

Transport phenomena in a cold wall vertical reactor for metalorganic vapor phase growth of β-SiC layers

H. CHEHOUANI, S. BENET, B. ARMAS, C. COMBESCURE, A. FIGUERAS and S. GARELIK

J. Phys. IV France, 03 C3 (1993) C3-131-C3-138

DOI: 10.1051/jp4:1993316

H. CHEHOUANI

S. BENET

B. ARMAS

C. COMBESCURE

A. FIGUERAS

S. GARELIK

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