Journal de Physique IV

CONDITIONS FOR OBTAINING IN-SITU PHOSPHORUS DOPED LPCVD POLYSILICON LAYERS WITH HIGH CONDUCTIVITY ONTO GLASS SUBSTRATES

M. SARRET, A. LIBA, O. BONNAUD, M. MOKHTARI and B. FORTIN

J. Phys. IV France, 02 C2 (1991) C2-817-C2-822

DOI: 10.1051/jp4:1991296

M. SARRET

A. LIBA

O. BONNAUD

M. MOKHTARI

B. FORTIN

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