Journal de Physique IV

INFLUENCE OF CH₄ AND Ar ON THE MORPHOLOGIES OF Al₂O₃ - CVD COATINGS

M. DANZINGER, J. PENG, R. HAUBNER and B. LUX

J. Phys. IV France, 02 C2 (1991) C2-571-C2-578

DOI: 10.1051/jp4:1991268

M. DANZINGER

J. PENG

R. HAUBNER

B. LUX

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