Journal de Physique IV

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CHARACTERIZATION OF POLYCRYSTALLINE SILICON PARTICLES PRODUCED VIA CVD FROM MONOSILANE IN A FLUIDIZED BED REACTOR

M. MATSUKATA, T. ODAGIRI and T. KOJIMA

J. Phys. IV France, 02 C2 (1991) C2-483-C2-490

DOI: 10.1051/jp4:1991259

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