NEW OMCVD PRECURSORS FOR SELECTIVE COPPER METALLIZATION J.A.T. NORMAN, B.A. MURATORE, P.N. DYER, D.A. ROBERTS et A.K. HOCHBERG J. Phys. IV France, 02 C2 (1991) C2-271-C2-278 DOI: 10.1051/jp4:1991233
