Journal de Physique IV

METALORGANIC CHEMICAL VAPOR DEPOSITION : EXAMPLES OF THE INFLUENCE OF PRECURSOR STRUCTURE ON FILM PROPERTIES

K.F. JENSEN, A. ANNAPRAGADA, K.L. HO, J.-S. HUH, S. PATNAIK and S. SALIM

J. Phys. IV France, 02 C2 (1991) C2-243-C2-252

DOI: 10.1051/jp4:1991230

K.F. JENSEN

A. ANNAPRAGADA

K.L. HO

J.-S. HUH

S. PATNAIK

S. SALIM

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