SELECTIVE R.T.L.P.C.V.D. OF TUNGSTEN BY SILANE REDUCTION ON PATTERNED PPQ/Si WAFERS A. BOUTEVILLE, T. CHARRIER, J.C. REMY, J. PALLEAU et J. TORRES J. Phys. IV France, 02 C2 (1991) C2-857-C2-864 DOI: 10.1051/jp4:19912102