AN UNDERSTANDING OF IN SITU BORON DOPED POLYSILICON FILMS BY CHARACTERIZATION AND SIMULATION C. AZZARO, E. SCHEID, D. BIELLE-DASPET, P. DUVERNEUIL et P. BOUDRE J. Phys. IV France, 02 C2 (1991) C2-79-C2-85 DOI: 10.1051/jp4:1991209