Journal de Physique IV

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A NOVEL WAFER CAGE FOR BETTER UNIFORMITY OF PHOSPHORUS DOPED SILICON LAYERS : EXPERIMENTAL STUDY AND MODELLING

C. AZZARO, P. DUVERNEUIL and J.P. COUDERC

J. Phys. IV France, 02 C2 (1991) C2-71-C2-78

DOI: 10.1051/jp4:1991208

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