TiN-TixSiy Codeposits A.P.C.V.D. Produced Using the TiCl4-N2-SiH2Cl2-H2 System G. Llauro, A. Bendeddouche, M. Nadal et R. HillelJ. Phys. IV France, 05 C5 (1995) C5-801-C5-807DOI: https://doi.org/10.1051/jphyscol:1995595
