PE MOCVD of Thin High Transparent Dielectric Amorphous Films of Aluminium Oxide V. P. Ovsyannikov, G. V. Lashkaryov et E. A. MazurenkoJ. Phys. IV France, 05 C5 (1995) C5-705-C5-709DOI: https://doi.org/10.1051/jphyscol:1995585
