Growth Kinetics of Copper Films from Photoassisted CVD of Copperacetylacetonate D. Tonneau, R. Pierrisnard, H. Dallaporta et W. MarineJ. Phys. IV France, 05 C5 (1995) C5-629-C5-635DOI: https://doi.org/10.1051/jphyscol:1995575
