Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing G. Beshkov, D. Dimitrov, S. Georgiev et T. DimitrovaJ. Phys. IV France, 05 C5 (1995) C5-615-C5-619DOI: https://doi.org/10.1051/jphyscol:1995573
