SIPOS Deposition from Disilane : Experimental Study and Modelling C. Cordier, E. Dehan, E. Scheid, P. Duverneuil et J. P. CoudercJ. Phys. IV France, 05 C5 (1995) C5-315-C5-322DOI: https://doi.org/10.1051/jphyscol:1995537
