Low Pressure CVD of Silicon Nitride from a Silane-Ammonia Mixture : Analysis of Preliminary Experimental and Simulation Results K. Yacoubi, C. Azzaro et J. P. CoudercJ. Phys. IV France, 05 C5 (1995) C5-291-C5-298DOI: https://doi.org/10.1051/jphyscol:1995534
