A Study of CVD of Gallium Nitride Films by In Situ Gas-Phase UV Spectroscopy S. E. Alexandrov, A. Y. Kovalgin et D. M. KrasovitskiyJ. Phys. IV France, 05 C5 (1995) C5-183-C5-190DOI: https://doi.org/10.1051/jphyscol:1995520
