Powder Dissipation in PECVD for SiH4-CH4-H2 Gas Mixtures P. Rava, G. Crovini, F. Demichelis, F. Giorgis, R. Galloni, R. Rizzoli et C. SummonteJ. Phys. IV France, 05 C5 (1995) C5-1125-C5-1132DOI: https://doi.org/10.1051/jphyscol:19955133
