Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic Carbon F. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas et F. MauryJ. Phys. IV France, 05 C5 (1995) C5-89-C5-96DOI: https://doi.org/10.1051/jphyscol:1995508