New developments in textured and epitaxial NbN superconducting layers for ultimate sensors and RSFQ digital circuits J.-C. Villégier, N. Hadacek, C. Jorel, J.-L. Thomassin, V. Bouchiat, M. Faucher, P. Febvre, A. Rousy et G. LamuraJ. Phys. IV France, 12 3 (2002) 129-132DOI: https://doi.org/10.1051/jp420020051