Investigation of the effects of Ar plasma etching in Si surface by photoacoustic method D.M. Todorović, M. Smiljanić, M. Sarajlić, D. Vasiljević-Radović et D. RandjelovićJ. Phys. IV France, 125 (2005) 451-453DOI: https://doi.org/10.1051/jp4:2005125106
