Diffraction limited, EUV interference microscope with long working distance, using one spherical off-axis mirror and a Fresnel bimirror interferometer D. Joyeux, D. Phalippou, R. Mercier, M. Mullot, M. Lamare, A. Klisnick, D. Ros et O. GuilbaudJ. Phys. IV France, 104 (2003) 263-266DOI: https://doi.org/10.1051/jp4:200300076
