Fabrication of soft X-ray beam splitters for use in the wavelength region around 13 nm H. Takenaka, S. Ichimaru, T. Haga, T. Ohchi, H. Ito, Y. Muramatsu, E.M. Gullikson et R.C.C. PereraJ. Phys. IV France, 104 (2003) 251-254DOI: https://doi.org/10.1051/jp4:200300073
