Molecular beam mass spectrometry analysis of gaseous species responsible for diamond deposition in microwave plasmas O. Aubry, J.-L. Delfau, C. Met, M.I. De Barros, L. Vandenbulcke et C. VovelleJ. Phys. IV France, 12 4 (2002) 75-84DOI: https://doi.org/10.1051/jp4:20020080
