Atmospheric pressure chemical vapour deposition of BPSG films from TEOS, 03, TMB, TMPI: Determination of a chemical mechanism J.-P. Nieto, B. Caussat, J.-P. Couderc, I. Orain' et L. JeannerotJ. Phys. IV France, 12 4 (2002) 37-44DOI: https://doi.org/10.1051/jp4:20020075
