Preliminary studies of atmospheric pressure plasma enhanced CVD (AP-PECVD) of thin oxide films N. McSporran, M.L. Hitchman, S.E. Alexandrov, S.H. Shamlian, S. Turnbull et S. TurnbullJ. Phys. IV France, 12 4 (2002) 17-23DOI: https://doi.org/10.1051/jp4:20020072
