Effect of double-layers formation on the deposition of microcrystalline silicon films in hydrogen diluted silane discharges A. Hammad, E. Amanatides, D. E. Rapakoulias et D. MatarasJ. Phys. IV France, 11 PR3 (2001) Pr3-779-Pr3-785DOI: https://doi.org/10.1051/jp4:2001398
