RMPECVD of silica films with a high microwave power (1600 W) parametric studies P. Tristant, J. Desmaison, F. Naudin et D. MerleJ. Phys. IV France, 11 PR3 (2001) Pr3-771-Pr3-778DOI: https://doi.org/10.1051/jp4:2001397
