Growth of BON thin films by plasma assisted MOCVD and study of deposition parameter effects on the film structure G. C. Chen, M. C. Kim, T. H. Kim, S.-B. Lee et J.-H. BooJ. Phys. IV France, 11 PR3 (2001) Pr3-763-Pr3-770DOI: https://doi.org/10.1051/jp4:2001396
