GeO2 and SiO2 thin film preparation with CVD using ultraviolet excimer lamps K. Kurosawa, Y. Maezono, J.-I. Miyano, T. Motoyama et A. YokotaniJ. Phys. IV France, 11 PR3 (2001) Pr3-739-Pr3-745DOI: https://doi.org/10.1051/jp4:2001393
