Comparative characterization of nitrogen-rich CNx films prepared by different ICP-CVD techniques C. Popov, J. Bulir, L. Zambov, M. Jelinek et M.-P. Delplancke-OgletreeJ. Phys. IV France, 11 PR3 (2001) Pr3-731-Pr3-738DOI: https://doi.org/10.1051/jp4:2001392
