Vapor pressure of precursors for CVD on the base of platinum group metals N. B. Morozova, G. I. Zharkova, P. P. Semyannikov, S. V. Sysoev, I. K. Igumenov, N. E. Fedotova et N. V. GelfondJ. Phys. IV France, 11 PR3 (2001) Pr3-609-Pr3-616DOI: https://doi.org/10.1051/jp4:2001377
