Al2O3 growth optimisation using aluminium dimethylisopropoxide as precursor as a function of reaction conditions and reacting gases D. Barreca, G. A. Battiston, G. Carta, R. Gerbasi, G. Rossetto, E. Tondello et P. ZanellaJ. Phys. IV France, 11 PR3 (2001) Pr3-539-Pr3-546DOI: https://doi.org/10.1051/jp4:2001368
