Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD F. Hamelmann, A. Aschentrup, J. Schmalhorst, U. Kleineberg, U. Heinzmann, K. Dittmar et P. JutziJ. Phys. IV France, 11 PR3 (2001) Pr3-431-Pr3-436DOI: https://doi.org/10.1051/jp4:2001354
