Properties of thin AIN films prepared by PECVD and rapid thermal processes G. D. Beshkov, S. S. Georgiev, K. G. Grigorov, H. S. Maciel, A. Djouadi et M. MarinovJ. Phys. IV France, 11 PR3 (2001) Pr3-287-Pr3-292DOI: https://doi.org/10.1051/jp4:2001336
