Computational analysis of horizontal cold wall CVD reactors at low pressure : Application to tungsten deposition from pyrolysis of W(CO)6 T. C. Xenidou, M. K. Koukou, A. G. Boudouvis et N. C. MarkatosJ. Phys. IV France, 11 PR3 (2001) Pr3-183-Pr3-188DOI: https://doi.org/10.1051/jp4:2001323
