Atmospheric pressure chemical vapour deposition of BPSG films from TEOS, O3, TMB, TMPi : Determination of a chemical mechanism J.-P. Nieto, B. Caussat, J.-P. Couderc, I. Orain et L. JeannerotJ. Phys. IV France, 11 PR3 (2001) Pr3-149-Pr3-154DOI: https://doi.org/10.1051/jp4:2001318
