Kinetics of LPCVD of gallium nitride and oxynitride films based on pyrolysis of a gallium chloride complex with ammonia GaCl3NH3 S. E. Alexandrov et V. A. KriakinJ. Phys. IV France, 11 PR3 (2001) Pr3-141-Pr3-148DOI: https://doi.org/10.1051/jp4:2001317