GaN heteroepitaxy by remote plasma MOCVD : Real time monitoring by laser reflectance interferometry M. Losurdo, A. Grimaldi, M. Giangregorio, P. Capezzuto et G. BrunoJ. Phys. IV France, 11 PR3 (2001) Pr3-1175-Pr3-1182DOI: https://doi.org/10.1051/jp4:20013148