In situ mass spectrometry during thermal CVD of the tris-acetylacetonates of 3-d transition metals P. P. Semyannikov, I. K. Igumenov, S. V. Trubin et I. P. AsanovJ. Phys. IV France, 11 PR3 (2001) Pr3-995-Pr3-1003DOI: https://doi.org/10.1051/jp4:20013125
